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PHOOPF: 8th Floor Optoelectronic Processing Facility Equipment Maintenance Downtime Log

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Color Code DefinitionsDOWN - Equipment not usable

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UP - Equipment is operational

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Partially Operational - Equipment may be usable contact Lab Manager

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DateEquipmentStatusFollow on NotesSystem Update

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10/09/07Edward's Electron Beam EvaporatorDOWNCryopump regen overnightStandard Maintenance

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10/11/07Edwards EBeam EvaporatorUPCryopump regen completely and cryopump temperature at 10K.Maintenance Complete

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10/12/07Edwards EBeam EvaporatorDOWNCannot get the vacuum interlock to work in order for the main power for the egun to come on. Called tech support this morning and waiting to hear back.
10/15/07 service tech ask me to troubleshoot the problem. 		Service in process

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10/12/07Heidelberg Direct Write DWL66DOWNImage out of focus. Email service engineer for advice, waiting to heard back.
10/15/07 service engineer reply ongoing troubleshooting problem.
10/24/07 service engineer inform me that the part will arrive by 10/30/07.
11/02/07 part installed and tool being recalibrated. 		Service in process

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10/17/07Edwards EBeam EvaporatorPartially OperationalManually over riding vacuum interlock each time the tool is in use. Service engineer working on the problem.
1/16/08 Install new ribbon cable, still the interlock not working. The problem is the 1706 controller, will need to order one.
1/18/08 1706 controller on order.		Service in process

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10/22/07Sharon EBeam EvaporatorDOWNCan't maintain pressure when doing evaporation run due to water leak from egun. Remove shielding and tin foil, egun, sensor head and blank off fittings and ports. Pump chamber down overnight for base pressure reading.
10/23/07 - pressure at 2.4-7torr, remove filament transformer and blank off port. Pump chamber down overnight for base pressure reading.
10/24/07 pressure at 1.1-7 torr, install new built egun, shielding, sensor and filament transformer and pump overnight.		Standard Maintenance

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10/22/07SputtererDOWNRemove tin foil and shutters, cathode shields and clamping rings, clean chamber. Chemical cleaning shields, shutters, and clamping rings. Install new tin foil in chamber.Standard Maintenance

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10/22/07Plasma AsherDOWNDisplay screen not working. Called Tech support for help.
Service in process

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10/24/07Plasma AsherPartially OperationalWaiting on pricing for replacement display monitor.
12/07/07 - New LCD monitor on order. Ship date TBD.		Parts on Order

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10/25/07Sharon EBeam EvaporatorUPPressure at 2.4-7torr.Maintenance Complete

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10/25/07SputtererUPPressure at 5.4-8 torr.Maintenance Complete

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11/02/07Sharon EBeam EvaporatorDOWNCryopump compressor shut down. Regen cryopump overnight and restart compressor.
11/05/07 - Compressor failed again. Bad PHO building supply coolant regulator will be replaced today. 		Service in process

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11/02/07Deep Silicon ICP Reactive Ion EtcherDOWNCalled service engineer regarding C4F8 gas pressure flow problem, working on the problem after speaking with him.
11/05/07 - bad C4F8 MFC. New part should arrive by 11/08/07.
11/07/07 - Part arrived and installed. Pumping line overnight for leak up rate test in the morning.		Service in process

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11/05/07Heidelberg Direct Write DWL66UPAutoFocus recalibrated and tool working fine.Service Complete

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11/05/07Sharon EBeam EvaporatorUPRegulator replaced.Service Complete

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11/08/07Deep Silicon ICP Reactive Ion EtcherUPLeakup rate ok and MFC working fine.Service Complete

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11/20/07Sharon EBeam EvaporatorPartially Operationalsweep controller not working and sent back for repairs. Second sweep controller is being use for now.Service in process

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11/21/07Sharon EBeam EvaporatorDOWNWater leak reported in main process chamber. Will investigation problem on Monday 11/26/07.
11/26/07 - Remove Egun and clean chamber. Pump chamber down overnight.
11/27/07 - Pressure 3.4x10-7 torr, rebuilt Egun, Remove and replace tin foil on shieldings.
11/28/07 - Install Egun and test. 		Service in process

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11/28/07Sharon EBeam EvaporatorPartially OperationalPumping speed slower than normal and second sweep controller getting sweep error.
12/03/07 - Problem with second sweep controller getting sweep error. Call vendor for product support.		Service in process

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11/29/07Edwards Thermal EvaporatorDOWNGlass bell jar is cracked. Placed order for new jar.
12/03/07 - Parts are order and should have the tool on line by Tuesday, 12/11.		Parts on Order

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12/11/07Edwards Thermal EvaporatorUPGlass Bell jar and viton L gasket replaced. Pumping on chamber, 5.5E-6 torr in 15 minutes.Service Complete

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12/18/07Deep Silicon ICP Reactive Ion EtcherDOWNParticles in process chamber. Clean chamber but helium leak up rate out of spec. still.
12/20/07 - Call service engineer for technical assistant.		Service in process

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12/18/07SputtererDOWNRotary Motion Sample Stage not rotating. Ordering new part will be deliver in 5 weeks (around 1st week in February).
01/02/08 mechanical pump leaking oil a lot, sent out for repairs.		Parts on Order

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12/20/07Plasma AsherUPInstalled new touch screen LCD monitor.Service Complete

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12/21/07Deep Silicon ICP Reactive Ion EtcherUPResolve particle issue in process chamber. Helium leak up rate back to normal.Service Call Completed

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01/15/08Deep Silicon ICP Reactive Ion EtcherDOWNAffinity Chiller Fault light ON, call service engineer for assistance.
01/17/08 - Affinity Chiller pump head seized, order new part.		Parts on Order

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01/21/08Reactive Ion EtcherDOWNTurbo pump fail and need to be replace.
Service in process

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01/23/08Reactive Ion EtcherUPReplaced turbo pump and check vacuum pressureService Complete

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01/25/08Deep Silicon ICP Reactive Ion EtcherUPInstalled new pump head to DI chiller and install new DI filter cartridge.Service Complete

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02/06/08Sharon EBeam EvaporatorDOWNCompressor over heating and shutting down. Call tech support for assistant.Service in process

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02/08/08Edwards EBeam EvaporatorDOWNCompressor failed. Regen cryopump over weekend. Service in process

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02/11/08Edwards EBeam EvaporatorPartially OperationalRegen completed and cryopump at 15K. New controller on order for vacuum interlock problem. Still need to manually override interlock.Service in process

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02/12/08Sharon EBeam EvaporatorUPCompressor and cryopump all set running fine.
New sweep controller installed and interlock tested ok.		Service Complete

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02/12/08SputtererUPInstall repair rotary feed through.
Temporary install mechanical pump from Leybold leak detector until rebuilt pump comes back from repair shop.		Service Complete

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02/19/08Edwards EBeam EvaporatorPartially OperationalInstall New 1706 controller and test - still having issue with vacuum interlock.
Call tech support again for help. Still need to manually override vacuum interlock.		Service in process

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05/06/08Heidelberg Direct Write DWL66DOWNProblems with 10mm and 2mm write heads and softwareService in process

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05/13/08Heidelberg Direct Write DWL66UPNo problems with 10mm or 2mm write heads. Problem in 10mm write head software is resolved. Test run OKService Call Completed

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05/28/08Wedge BonderPartially OperationalProblem with Semi/Auto mode. Call service for help and troubleshooting. Could not resolve issue, need service visit. Can still operate wedge bonder in Manual Z mode.
5/29/08 Getting quote and PO approval.
Service engineer schedule for June 20th or 23rd for service visit.		Service in process

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05/29/08Deep Silicon ICP Reactive Ion EtcherDOWNProblem with Helium flow out of tolerance. Call service for help and troubleshooting. Service in process

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06/16/08Headway Photoresist SpinnersDOWNProblem with the Controller - keeps turning ON and OFF (rebooting itself). Call for technical help. Need to send controller back for repairs. Service in process

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06/17/08Deep Silicon ICP Reactive Ion EtcherUPProblem with helium flow out of tolerance repaired. Service engineer replaced o-rings and electrode stem guide. Test system and helium flow and pressure - OK. Service Call Completed

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06/20/08Headway Photoresist SpinnersUPReceived controller and install and test unit - OKService Complete

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07/25/08Wedge BonderUPProblem with semi/Auto mode repair. Cause was 1st search pot shorted or open - replace with new pot. Service Complete

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08/04/08Deep Silicon ICP Reactive Ion EtcherDOWNBuild experience brown out on 8/4/08. Could not get wafer handler computer to communicate with the tool. Call STS service engineer for technical help.
Trouble shooting the problem and the root cause could be comm board is bad on the wafer handler computer. Need to be order and replace.
Replace handle comm board and still the same problem. Next will replace comm board on handler PC. Put in service call waiting for PO and schedule.
Service engineer on site 10/2 and 10/3 - determined that comm board on main PC will need to be replace. Part on order schedule for delivery 10/27?		Parts on Order

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08/27/08Heidelberg Direct Write DWL66DOWNProblem up loading files to mask writer PC after conversion is completed on the conversion PC. Tiger in contact with service for technical help.Service in process

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09/15/08Heidelberg Direct Write DWL66Partially OperationalStill a problem with transfering conversion files to mask writer computer. But can manually transfer files - see procedure by mask writer.Service in process

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09/17/08Heidelberg Direct Write DWL66UPConversion file transfer problem issue - solve. Ip address was either changed or corrupted.Service Call Completed

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09/18/08Edwards Thermal EvaporatorPartially OperationalProblem with no current to sources. Contact tech support and troubleshooting. Problem is bad LT switch will order new switch.Parts on Order

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10/06/08Edwards Thermal EvaporatorUPReplaced LT/HT switch (Moeller part# T0-3-15423/EZ).Service Complete

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10/17/08Edwards Thermal EvaporatorDOWNTurbo pump making loud noise when spinning. Need to be sent out for repairs.
New pump on ordered, lead time 4 to 5 weeks, due sometime in 1st week in December.
Repair pump received and install, but new problem arise. Turbo pump controller bad and needs repair or replacement 		Service in process

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11/04/08Surface ProfilerDOWNHoming elevator and homing scan not functioning. Call tech support for assistant.
Waiting for part and service quotation. Parts ordered and received. Wait for schedule service visit		Service in process

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11/05/08CHA EvaporatorDOWNPower Supply problems. Called tech support for assistant.Service in process

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11/13/08CHA EvaporatorUPPower Supply problems repair, bad connector contact.Service Complete

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11/17/08Deep Silicon ICP Reactive Ion EtcherUPPower supply to main PC OS replaced and PC on handle original comm board replaced. New comm board received was defective and sent back for warrenty replacement. Service Complete

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11/26/08VASE EllipsometerDOWNVB400 controller bad and sent out for repairs.Service in process

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12/04/08Surface ProfilerUPService Engineer replaced AS500 scan string and replace sensor for holme elevator.Service Complete

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12/10/08Deep Silicon ICP Reactive Ion EtcherDOWNHigh helium leak up rate. Will need to vent and manually clean the klinks plate.Service in process

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12/15/08Sharon EBeam EvaporatorDOWNCompressor shutted down and cyropump at room temperature. Need to regen pump.Service in process

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12/18/08Deep Silicon ICP Reactive Ion EtcherUPClean klinks plate and ran O2 clean.Service Complete

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12/18/08Sharon EBeam EvaporatorUPRegen completed and cryopump at 15K. Service Complete

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12/18/08VASE EllipsometerUPVB400 controller received and installed. Working fine now.Service Complete

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12/20/08Sharon EBeam EvaporatorDOWNProblem with Photonics building coolant water system.
Problem with Scroll pump and will need to send out for repairs or exchange.
Received scroll pump 1/12/09, will install next day.		Parts on Order

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01/05/09EllipsometerPartially OperationalBad key switch, but can still operate tool if key is held on in one position. New key switch on order.Parts on Order

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01/13/09Sharon EBeam EvaporatorUPReceived scroll pump on 1/12/09 and install by Chad and Ashwin (training) and regen system.
Service Complete

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01/13/09EllipsometerUPKey switch received and installed.Service Complete

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01/20/09Reactive Ion EtcherDOWNMachanical pump leaking oil and needs overhaul.Service in process

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12/04/09Reactive Ion EtcherUPRebuilt pump installed and test run overnight.Service Complete

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02/23/09Edwards Thermal EvaporatorDOWNTurbo pump fail and need to be ship back for repair.
Service in process

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02/24/09MJB3 Mask AlignerDOWNAlignment Stage Assembly need to be ship back for repair.Service in process

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03/17/09Edwards Thermal EvaporatorDOWNTurbo pump fail.Service in process

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03/19/09Edwards Thermal EvaporatorUPInstall NEW Edwards Turbo pump.Service Complete

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03/23/09Plasma AsherDOWNNeed to send computer back for evalution and repair.Service in process

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03/30/09CHA EvaporatorDOWNtroubleshoot interlock problemService in process

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03/31/09CHA EvaporatorUPInterlock problem solve but intermittent.Service Call Completed

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04/07/09Plasma AsherUPInstall repair computer (mother board and hard drive replaced), problem with comm with RF generator. Problem resolve after contacting tech support.Service Call Completed

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04/15/09MJB3 Mask AlignerUPAlignment Stage Assembly repair and PM completed.Service Call Completed

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04/17/09Edwards EBeam EvaporatorDOWNRegen cryopump and now compressor not powering ON. Call service engineer for assistant.Service in process

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04/23/09Thermal Oxide FurnaceDOWNOxygen gas ran out, on orderParts on Order

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04/27/09Thermal Oxide FurnaceUPNew Oxygen gas cylinder installService Complete

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05/04/09Heidelberg Direct Write DWL66DOWNMain computer power supply will need to be replace.Parts on Order

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05/05/09Edwards EBeam EvaporatorUPBorrow Cryopump compressor from professor Mohanty's lab and installed and running.
Will either repair or purchase new compressor.		Service Call Completed

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05/10/09Heidelberg Direct Write DWL66UPComputer power supply was replaced. Service Call Completed

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06/08/09Edwards EBeam EvaporatorDOWNRegen cryopump and testing for vacuum leak. Call service engineer for assistant. Service in process

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06/15/09Edwards EBeam EvaporatorPartially OperationalProblem with Penning vacuum gauge, incorrect vacuum pressure readings. Parts on Order

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06/17/09SputtererDOWNProblem vacuum chamber leak. Leak check with Helium leak detector. Leak in the Hi vac poppet shaft assemblyParts on Order

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06/19/09Dicing SawDOWNWafer cutting stage not working.Service in process

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06/26/09Dicing SawPartially Operationalproblem with stage linear motion slider, water got in and rusted the bearings. Clean and relub bearings not 100% , but ok for now.Service Complete

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07/03/09Sharon EBeam EvaporatorDOWNSweep controller interlock problem. Water leaking from water flow sensor unit. Parts on Order

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07/06/09SputtererUPReplace Hi vac poppet shaft assembly.Service Call Completed

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07/07/09Sharon EBeam EvaporatorUPRemove and clean water wheel paddles and repair water leak on water flow sensor unit. Sweep controller interlock working. Service Complete

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07/17/09Edwards EBeam EvaporatorUPReplace Penning vacuum gauge.Service Complete

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08/04/09Deep Silicon ICP Reactive Ion EtcherDOWNTool circuit breaker tripped. Booster pump water coolant lines blocked. On 09/18/09 pump had to be sent out for repairs.Service in process

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08/21/09Mask WriterDOWNComputer is not converting file and sending to other computer.Service in process

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08/29/09Mask WriterUPIP address fixed. Everything is working.Service Complete

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09/15/09MA6 Mask AlignerPartially OperationalService engineer visit routine PM found that BSA on the left hand side is not functioning. Need to order new BSA motor.Parts on Order

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09/24/09MA6 Mask AlignerUPInstall new BSA motorService Complete

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09/25/09Edwards EBeam EvaporatorDOWNCryopump fail and regen in progress.Service in process

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09/30/09Edwards EBeam EvaporatorUPCryopump regen completely and cryopump temperature at 10K.Service Complete

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11/02/09Edwards EBeam EvaporatorDOWNCryopump fail and regen in progress.Service in process

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11/02/09Deep Silicon ICP Reactive Ion EtcherUPRoughing pump repair and valve 1 did not close error message problem resolved.Service Complete

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11/04/09Edwards EBeam EvaporatorUPCryopump regen completely and cryopump temperature at 10K.Service Complete

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